Overview DEMO Site

With spectacular cycle of innovation as the microelectronic industry, this quick pace of innovation not only takes place in the development of product, processes and technologies, but in all aspects, which are directly associated, such as design of manufacturing facilities, etc. Together with technical advances, market becomes fiercely competitive, requiring multi-millions dollar investment in equipment and facilities, targeted at ever decreasing time span to market.

The challenge of facility design professionals is to develop a new generation of Fab capable of accommodating production line with the most stringent process conditions. Meanwhile facilities must be flexible to respond to changes of processes, technologies, and products. Under such complex consideration Realtime System provides a web based database (RTMS) to manage process tool data incorporated with process utility requirements and calculations of each utility consumption, e.g. power, exhaust, mechanical, gas, UPW, and chemical. The objective of RTMS development is to be the conjunction between process tool utility requirements and facility design criteria as a common platform more systematic and pragmatic for data search.

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RTMS Features

RTMS is designed for client to lookup data of production tool utility requirements by user-friendly graphic interfaces on internet browser. Based upon our tool point of use (POU) data structure and web based PHP design, it allows users to carry out robust data from any location where internet available making it an integrated report for distributing information. With its built-in password system, administrator can set permission to allow only licensing user access to search necessary data on-line. Data reports are not only used for production tool datasheet, but also for facility capacity and piping distribution designs covered from small areas up to overall facilities.

RTMS is also available as a stand-alone version to provide local tool data development, lookup, and analysis in case of client’s confidentiality need.

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RTMS System Architecture

OS:
- Linux Fedora Code 6.0
- Windows 2000 server/2003 server/XP

Web Serevr:
- Apache 2.2
- PHP 5.2

Database:
- MySQL 5.0

DB Tool:
- php Myadmin 2.5 for Xoop module
- Web CMS: Xoops Chinese 2.0.13.2 (UTF-8)

Client:
- Microsoft IE 6.0 or higher

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XOOPS Module

XOOPS is an extensible, object oriented, easy to use dynamic web content management system written in Hypertext Preprocessor PHP. This is one of ideal tools for developing small to large dynamic community websites, intra company portals, corporate portals, weblogs and much more. It can be installed on an Internet host with a PHP-capable web server (e.g., Apache) and a database (e.g., MySQL). XOOPS is released under the terms of the GNU General Public License (GPL) and is free to use and modify. It is free to redistribute as long as users abide by the distribution terms of the GPL.

RTMS is designed as part of XOOP modules. Through its eXtensible Object Oriented Portal System striving steadily on the track of Content Management System, It can serve as a web framework for use by small, medium and large sites.

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RTMS Functionality

RTMS is to manage process tool utility data by SQL and web based software more systematic and pragmatic for data search and report.

Utility requirements
Each tool’s point of use data (physical data, utility consumption, connection type and material, facility provisions, etc) is configured by specific data structure.

Tool list
Tool list can be developed serving as a quantity for the target production tools. Its selection is obtained from RTMS generic Toolkits prepared by our data manager.

Utility consumption and distribution
Through the proven analysis algorithm RTMS allows users to lookup a particular utility requirement to overall facility consumption. Take-off book offers the administration of thousands of points of use (POU) on the process tools and their connections to the utility distribution systems.

Facility design
RTMS can organize an appropriate design starting points, to make realistic trade-off between process layout, architectural, cleanroom concept, utility distribution, and hookup etc. Moreover RTMS build-in functions to calculate fluid dynamics (pressure drop, velocity, etc) providing the check and balance of each POU flow data.

Hookup time
Each generic tool data incorporated with relevant hookup time schedule, tool hookup time can be managed once tool type and quantity, and tool move-in time defaulted already

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RTMS Applications

Data Assortment:
- Facilities
- POU
- QTY
- Area
- Phase
- Move-in Dates

Database and SQL Design:
- Tool List
- POU Matrix
- Overall PUR
- Material List (POU based)
- Hook-Up Time
- Take-off Book

Further Applications:
- Cost Benchmarking
- Fab-wide Statistics
- Facility Sizing
- Pressure Balance

Reference Codes
- SEMATECH DOC# 00043939-ENG: Utility Consumption Characterization Protocol for Semiconductor Tools
- SEMI E6-1296: Facilities Interface Specifications Guideline and Format
- SEMI E10-1296: Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
- SEM E51-0200: Guide for Typical Facilities Services and Termination Matrix
- SEMI E72-0600: Specification and Guide for 300mm Equipment Footprint, Height, and Weight
- SEMI E76-0299: Guide for 300mm Process Equipment Points of Connection to Facility Services